VAPBOX 1500
Vapbox 1500 DLI can be integrated on any CVD and ALD machine. It can vaporize at up to 300°C two liquids or two solutions sequentially or simultaneously under vacuum or at atmospheric pressure.
VAPBOX 1500 Technical specifications
General
- One or two injection heads
- Liquid inlet: 1/8” compression type fitting
- Carrier gas inlet: 1/4" female VCR fitting
- Vapor outlet: 1/2" male VCR fitting
- Other fittings are available upon request
Heating
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Three heating zones, up to 300°C, 1650 W (230 VAC or 115 VAC)
- 3 K type thermocouples: (1 per heating zone)
- Current needed: 7.2 A (230 VAC) ; 14.4 A (115 VAC)
Accessories:
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Liquid panel including one or two precursor tanks and a solvent tank (or only one or two precursor tanks)
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1 or 2 liquid flow controlling kits with a Liquid Flow Meter (LFM) per kit
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Carrier gas panel including a carrier gas line with one Mass Flow Meter (MFM) per injection head
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TCU (Temperature Control Unit): 19” rackable 4U box
