KEMSTREAM has developed Atokit series, a range of atomizers. Atokit atomizers feature an innovative and proprietary injection-atomization technology called injection head. Atokit DLI atomizers generate an aerosol that can be delivered to any atmospheric pressure process or that can be vaporized under vacuum or atmospheric pressure for generating pure vapor for every application that requires a reactive gas phase that has to be obtained from liquid and solid compounds and precursors. These applications include CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes. Atokit can inject and atomize either pure liquids or liquids and solids dissolved in a carrier organic solvent or in a mixture of organic solvents. If an Atokit is used to deliver an aerosol flow to a process, the processes addressed are spray CVD, Aerosol Assisted CVD (AACVD), spray pyrolysis and pyrosol processes. If an Atokit is installed by the customer on a vaporization chamber, processes addressed by Atokit DLI vaporizers are CVD and ALD processes.
All Atokit atomizers use KEMSTREAM innovative and proprietary injection head. It allows them to provide excellent performances based on a very fine pulsed atomization of a pulsed liquid flow mixed with a carrier gas prior to injection. The pulsed injection of the carrier gas blasts the liquid as an aerosol of very small droplets. If the aerosol is delivered in a vaporization chamber, the carrier gas also serves as a heat transfer media and brings very rapidly heat energy from the hot walls of the vaporization chamber to the droplets promoting a flash and contactless vaporization process. A chemically pure vapor is thus generated for the process without undesired decomposition while avoiding to deliver particles and liquid droplets to the process. When they are combined with a vaporization chamber, because Atokit direct liquid injection atomizers can start and stop delivering aerosols very quickly, they are almost “vapor-on-demand” systems.
Two different models of Atokit direct liquid injection atomizers exist, Atokit CF100 and Atokit KF50. They both feature one injection head. Atokit CF100 features a CF100mm heated flange. It is designed to be installed on a vaporization chamber. Atokit KF50 features a KF50mm flange. It is designed to be installed on spray CVD, Aerosol Assisted CVD (AACVD), spray pyrolysis and pyrosol machines. Atokit DLI atomizers can be used in association with most advanced liquid flow measurement technologies including very versatile Coriolis-based technology and CMOS thermal sensor technology. Customized Atokit can also be designed and provided to meet special customer request/need.
Compact and low cost DLI atomizer that can operate up to 300°C. It features one high performance and proprietary Kemstream injection head.