SEMCO Technologies/KEMSTREAM at the 23nd International Conference on ALD 2023
From July 23 to July 26 2023, SEMCO Technologies/KEMSTREAM will exhibit on ECM Greentech booth at the AVS 23rd International Conference on Atomic Layer Deposition (ALD 2023) featuring the 10th International Atomic Layer Etching Workshop (ALE 2023) in Bellevue, WA, USA.
SEMCO Technologies/KEMSTREAM will present KEMSTREAM and Flowlink products as well as SEMCO Technologies Electrostatic chucks (ESC or E-Chuck). KEMSTREAM products include Vapbox series DLI vaporizers that are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD. Flowlink products are gas components for UHP gases handling and they include valves (diaphragm and bellow ones, standard and special), complex valves manifolds, filters and check valves. SEMCO Technologies Electrostatic chucks and smart clamping solutions can handle thin and ultra-thin wafers, up 450 mm diameter and up to 650°C.
Please stop by ECM Greentech booth # 315 where you can meet our ALD and ALE experts and discuss your need of gas components, of Electrostatic chucks and of vaporization of ALD precursors and ALE reactants.
For more details about the event, please visit: https://ald2023.avs.org/