KEMSTREAM at Joint EUROCVD 22 - Baltic ALD 16
KEMSTREAM will exhibit at the Joint EUROCVD 22 - Baltic ALD 16 conference from June 24 to 28 2019, in Luxembourg. The conference will offer a high quality scientific program with invited and contributed lectures in key development areas based on chemical processing from the gas phase. KEMSTREAM will present its latest development and advancement in the field of DLI (Direct Liquid Injection) vaporizers designed for generating reactive gas phases from pure liquids or solutions (liquid and solid compounds dissolved in an organic solvent). KEMSTREAM Vapbox series DLI vaporizers are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD.
More details about the conference and registration on www.eurocvd-balticald2019.lu