News

From November 12 to November 15 2024, during Semicon Europa 2024 in Messe Munich please stop by ECM Greentech booth # C1269 Hall C1 where you can meet ECM Components technical experts and discuss your need of CVD/ALD DLI vaporizers (Vapbox from KEMSTREAM) and of gas components (FLOWLINK valves) and gas panels for ultra-high purity gas handling.

For more details about the event, please visit: https://www.semiconeuropa.org/

From November 22 to November 24 2024, ECM Components will be sponsor of and will exhibit at RAFALD2024 French workshop on Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) in Nantes, France.

ECM Components will present KEMSTREAM and Flowlink products. KEMSTREAM products include Vapbox series DLI vaporizers that are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors as well as ALE reactants. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD. Flowlink products are gas components for Ultra High Purity gases handling and they include valves (diaphragm and bellow ones, standard and special), complex valves manifolds, filters and check valves. FLOWLINK gas components are widely used on MOCVD machines.

Please stop by our booth where you can meet our ALD and ALE experts and discuss your need of gas components and of vaporization of ALD precursors and ALE reactants.

For more details about the event, please visit: https://rafald.org/fr/2024/09/02/inscriptions/

Since beginning of May 2024, the gas components and ESC (E-Chucks) activities within SEMCO Technologies have been legally separated in order to better meet the specific needs of our customers as well as to market developments.

Our new company, named ECM COMPONENTS, is part of the ECM Group, such as our previous legal entity SEMCO Technologies. ESC activity stays in SEMCO Technologies.

ECM Components SAS currently brings together three activities: the supply of gas components and gas panels under the FLOWLINK brand, the supply of evaporators under the KEMSTREAM brand, and the supply of metal filters under the PORAL Filtration brand.

This strategic decision aims to strengthen our positioning in each area of activity and to guarantee a better focus of resources and skills.

From August 4 to August 7 2024, SEMCO Technologies will exhibit on booth #7 at the AVS 24^th International Conference on Atomic Layer Deposition (ALD 2024) featuring the 11^th International Atomic Layer Etching Workshop (ALE 2024) in Helsinki, Finland.

SEMCO Technologies will present KEMSTREAM and Flowlink products. KEMSTREAM products include Vapbox series DLI vaporizers that are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD. Flowlink products are gas components for UHP gases handling and they include valves (diaphragm and bellow ones, standard and special), complex valves manifolds, filters and check valves.

Please stop by booth # 7 where you can meet our ALD and ALE experts and discuss your need of gas components and of vaporization of ALD precursors and ALE reactants.

For more details about the event, please visit: https://ald2024.avs.org/

From March 20 to March 22 2024, during Semicon China 2024 at Shanghai New International Expo Centre (SNIEC) please stop by Beijing Longsun Technology Co., Ltd. booth # N4165 Hall 4 where you can meet our technical experts and discuss your need of gas components (Flowlink valves and KEMSTREAM CVD/ALD DLI vaporizers) and of SEMCO Technologies Electrostatic chucks (ESC).

For more details about the event, please visit: https://www.semiconchina.org/en/1

From Oct 9 to Oct 11 2023, SEMCO Technologies/KEMSTREAM will exhibit at the 244th ECS Meeting, in Gothenburg, Sweden. SEMCO Technologies/KEMSTREAM will present KEMSTREAM and Flowlink products as well as SEMCO Technologies Electrostatic chucks (ESC or E-Chuck). KEMSTREAM products include Vapbox series DLI vaporizers that are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD. Flowlink products are gas components for UHP gases handling and they include valves (diaphragm and bellow ones, standard and special), complex valves manifolds, filters and check valves. SEMCO Technologies Electrostatic chucks and smart clamping solutions can handle thin and ultra-thin wafers, up 450 mm diameter and up to 650°C.

Please stop by SEMCO Technologies booth # 415 where you can meet our ALD and ALE experts and discuss your need of gas components, of Electrostatic chucks and of vaporization of ALD precursors and ALE reactants.

For more details about the event, please visit: https://www.electrochem.org/244/

From July 23 to July 26 2023, SEMCO Technologies/KEMSTREAM will exhibit on ECM Greentech booth at the AVS 23^rd International Conference on Atomic Layer Deposition (ALD 2023) featuring the 10^th International Atomic Layer Etching Workshop (ALE 2023) in Bellevue, WA, USA.

SEMCO Technologies/KEMSTREAM will present KEMSTREAM and Flowlink products as well as SEMCO Technologies Electrostatic chucks (ESC or E-Chuck). KEMSTREAM products include Vapbox series DLI vaporizers that are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD. Flowlink products are gas components for UHP gases handling and they include valves (diaphragm and bellow ones, standard and special), complex valves manifolds, filters and check valves. SEMCO Technologies Electrostatic chucks and smart clamping solutions can handle thin and ultra-thin wafers, up 450 mm diameter and up to 650°C.

Please stop by ECM Greentech booth # 315 where you can meet our ALD and ALE experts and discuss your need of gas components, of Electrostatic chucks and of vaporization of ALD precursors and ALE reactants.

For more details about the event, please visit: https://ald2023.avs.org/

SEMCO Technologies/KEMSTREAM will exhibit at the Joint EUROCVD 23 - Baltic ALD 17conference from May 2 to June 2 2023, in Leuven, Belgium. SEMCO Technologies/KEMSTREAM will present KEMSTREAM and Flowlink products. KEMSTREAM products include Vapbox series DLI vaporizers that are especially efficient for low vapor pressure and thermally sensitive CVD and ALD precursors. KEMSTREAM’s Vapbox DLI vaporizers can operate at atmospheric pressure or under vacuum and can address a very wide range of ALD and CVD precursors and processes including CVD, MOCVD, PECVD, iCVD, CCVD, ALD, PEALD, MLD and MVD. Flowlink products are gas components for UHP gases handling and they include valves (diaphragm and bellow ones, standard and special), complex valves manifolds, filters and check valves.

More details about the conference and registration on https://www.eurocvd-balticald2023.org/

SEMCO Technologies, Castries, FRANCE, international leader in Electro Static Chuck (ESC) and UHP gas components (Flowlink valves) for the semiconductor industry, has acquired KEMSTREAM. SEMCO Technologies is part of ECM Group, an international leader in high performance industrial thermal solutions, with a turnover of more than 100 M€, present in more than 30 countries with 475 employees and 19 subsidiaries around the world.
The synergies created by this acquisition and the transfer of KEMSTREAM products manufacturing in new cleanroom recently built by SEMCO Technologies will allow KEMSTREAM accelerating the business growth in providing more DLI vaporizers for production applications. It will also allow KEMSTREAM to address customer needs in a more reactive manner by increasing the number of DLI vaporizers kept on stock.
Furthermore, KEMSTREAM products are very complementary to SEMCO Technologies products and will complete and extend the range of components offered by SEMCO Technologies to its customers.

From June 26 to June 29 2022, KEMSTREAM will exhibit at the AVS 22^nd International Conference on Atomic Layer Deposition (ALD 2022) featuring the 9^th International Atomic Layer Etching Workshop (ALE 2022). It will be a four-day meeting dedicated to the science and technology of atomic layer controlled deposition of thin films and now topics related to atomic layer etching. The conference will take place at the International Convention Center (ICC) Ghent in Ghent, Belgium. During the industry tradeshow that will take place along with the technical sessions, KEMSTREAM will present its latest developments and advancements in the field of DLI (Direct Liquid Injection) vaporizers designed for demanding ALD, ALE and CVD precursors-reactants and processes. Please stop by our booth # 30 where you can meet our ALD and ALE expert and discuss your need for vaporization of ALD precursors and ALE reactants. For more details about the event please visit: https://ald2022.avs.org/

KEMSTREAM introduces on the market a new version of the Vapbox 300, its best seller DLI vaporizer. Compared to the former version of the Vapbox 300, this new version features an improved internal design with new baffle geometry to increase vaporisation efficiency. The vaporization chamber of the new Vapbox 300 version is also able to operate up to 250°C for only 220°C for the former version. These modifications improve the global perfomances of the DLI vaporizer and open new possibilities and markets for the Vapbox 300.

July 18^th 2014 Montpellier, France, Advanced Direct Liquid Injection manufacturer Kemstream, enters into a sales collaboration agreement with the market leader HORIBA.

“As the recognized leader in flow and vapor control to the semiconductor industry HORIBASTEC is working together with its customers to develop products to deliver next generation precursors to the process chamber. We are very happy now to also bring Kemstream’s extensive expertise in advanced direct liquid injection technology to our customers”, comments Stuart Knight, HORIBA’s Europe VP. “HORIBA’s vaporizer product range will be complemented by Kemstream’s direct liquid injection products which will help us meet the unique demands of next generation solid precursors”.

HORIBASTEC, the world leader for semiconductor manufacturing industries, offers customers a full line of liquid flow control and liquid source vaporisation and control systems. A variety of vaporiser technologies are available from HORIBASTEC for different precursors. These include baking, direct injection and mixing to guarantee efficient and stable delivery of vapor to the point of use. Auto refill systems complete the line-up, offering uninterrupted, safe and reliable delivery of liquid precursors, increasing uptime and reducing operator handling and risk of process contamination.

Kemstream’s President, Jean Manuel Decams states, “we are very happy to collaborate with HORIBA. By taking Kemstream’s advanced direct liquid injection products and expertise and marrying with HORIBA’s experience and strong global network we feel that the wider market will have better access to Kemstream’s cutting edge direct liquid injection technology”.

Kemstream’s latest innovation is the Vapbox series, a wide range of high-performing direct liquid injection (DLI) vaporizers. Vapbox DLI vaporizers feature a proprietary injection-atomization technology and an optimized vaporization chamber design which allow them to perform reliable, accurate and repeatable vaporization of liquid and dissolved solid compounds and precursors. The Vapbox range generates pure vapors for every application that requires a reactive gas phase that has to be obtained from liquid or solid compounds and precursors. These applications include CVD (Chemical Vapor Deposition) and ALD (Atomic Layer Deposition) processes. 

About KEMSTREAM: KEMSTREAM develops and manufactures innovative advanced Direct Liquid Injection (DLI) vaporizers for demanding CVD, MOCVD, and ALD processes and precursors. KEMSTREAM products address research and development, pilot and production applications for diverse markets including semiconductor, glass and PV industries.

About HORIBA: HORIBA provides an extensive array of analytical instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing and metrology, to a broad range of scientific R&D and QC measurements. HORIBASTEC is a wholly owned subsidiary of HORIBA famous for mass flow controllers, compact direct injection devices and automatic refill systems for the semiconductor, photovoltaic and LED industries.

For further information please contact semi.sales@horiba.com or info@kemstream.com

In the picture: from left to right: Takuya Ito; HORIBASTEC Sales, Shigeji Ao; HORIBA Senior Applications Engineer, Stuart Knight; HORIBA European Segment VP, Jean Manuel Decams; Kemstream President, Herve Guillon; Kemstream Sales Manager, Samuel Bonnafous; Kemstream Engineering Director