VAPBOX 310
Vapbox 310 is the best compromise between size and performance. Its size makes its integration easy on most CVD and ALD machines. The optimized design of its vaporization chamber allows vaporization at up to 250°C high flow of one liquid or one solution under vacuum or at atmospheric pressure with a minimized risk of un-vaporized droplets and particles delivery to the process.
VAPBOX 310 Technical specifications
General
- One injection head
- Liquid inlet: 1/8” compression type fitting or 1/8” male VCR fitting
- Carrier gas inlet: 1/4" female VCR fitting
- Vapor outlet: 1/2" male VCR fitting
- Other fittings are available upon request
Heating
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One heating zone, up to 250°C, 400 W (230 VAC or 115 VAC)
- 2 K type thermocouples: (1 for heating control, 1 for alarm purpose)
- Current needed: 1.85 A (230 VAC) ; 3.7 A (115 VAC)
Options
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Optional purge inlet (1/4" female VCR fitting) on the top flange
Accessories
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Liquid panel including a precursor tank and a solvent tank (or only a precursor tank)
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Liquid flow controlling kit including a Liquid Flow Meter (LFM)
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Carrier gas panel including a carrier gas Mass Flow Meter (MFM)
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TCU (Temperature Control Unit): 19” rackable 3U box
